1.3, 1.55 μm photodetector based on Ge/GaAs hetero-integration prepared by MOCVD

Mingquan Xiao, Shijie Gong, Xieen Zheng,Yunjiang Jin

2020 International Conference on UK-China Emerging Technologies (UCET)(2020)

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摘要
In this work, p-Ge/GaAs hetero-epitaxy was studied by MOCVD and a p-Ge/i-GaAs/n-GaAs photodetector structure was fabricated aiming at 1.3, 1.55 $\mu$m photodetection. The photo-response spectra indicate that the prepared device has quite good performance on dark current and signal on/off ratio, suggesting promising application in optical fiber communication.
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关键词
Photodetectors,Gallium arsenide,Substrates,Epitaxial growth,Performance evaluation,MOCVD,Optical fiber communication
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