Jitter suppression for resonant galvo based high-throughput laser scanning systems.

Laser scanning has been widely used in material processing and optical imaging. Among the established scanners, resonant galvo scanners offer high scanning throughput and 100% duty cycle and have been employed in various laser scanning microscopes. However, the common applications of resonant galvo often suffer from position jitters which could introduce substantial measurement artifacts. In this work, we systematically quantify the impact of position sensor, data acquisition system and air turbulence and provide a simple solution to achieve jitter free high-throughput measurement. (C) 2020 Optical Society of America under the terms of the OSA Open Access Publishing Agreement