Improved Transmission Line Parameter Calculation Through TCAD Process Modeling for Superconductor Integrated Circuit Interconnects

Heinrich Frederick Herbst,Paul le Roux,Kyle Jackman,Coenrad Johann Fourie

IEEE Transactions on Applied Superconductivity（2020）

引用 7|浏览10

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摘要

The Florida Object-Oriented Device, Process and Reliability Simulator (FLOOXS) technology computer-aided design process modeling tools developed at the University of Florida have been adapted under the Intelligence Advanced Research Projects Activity SuperTools program to support the MIT Lincoln Laboratory SFQ5ee fabrication process. We use FLOOXS to build meshed models of passive transmission lin...

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关键词

Florida Object-Oriented Device,Process and Reliability Simulator (FLOOXS),passive transmission line,superconductor process modeling,technology computer-aided design (TCAD)

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