Corrections to “First-Order Piezoresistive Coefficients of Lateral NMOS FETs on 4H Silicon Carbide”

IEEE Sensors Journal(2020)

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摘要
We recently realized that the basic piezoresistivity matrix for 4H-SiC in the above paper [1] was not correct [2], [3]. The matrix and subsequent results are corrected here, and the section and equation numbers utilized here correspond to those in the original paper [1].
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关键词
Piezoresistance,Temperature measurement,Voltage measurement,MOS devices,Stress,Temperature sensors
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