Mössbauer spectroscopy study of surfactant sputtering induced Fe silicide formation on a Si surface

C. Beckmann, K. Zhang,H. Hofsäss, C. Brüsewitz,U. Vetter,K. Bharuth-Ram

Applied Surface Science（2015）

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摘要

•We study the formation of self-organized nanoscale dot and ripple patterns on Si.•Patterns are created by keV noble gas ion irradiation and simultaneous 57Fe co-deposition.•Ion-induced phase separation and the formation of a-FeSi2 is identified as relevant process.

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