Structural analysis , elemental profiling , and electrical characterization of thin films deposited on surfaces by atomic layer depositionR. Long,E. O'Connor,S. Newcomb,S. Monaghan,K. Cherkaoui,P. Casey,G. Hughes,K. Thomas, F., Chalvet,I. Povey,M. Pemble,P. Hurleysemanticscholar（2018）引用 0|浏览10AI 理解论文溯源树样例生成溯源树，研究论文发展脉络Chat Paper正在生成论文摘要
