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Formation of Metal Nano Layer using Tunneling Current through Thin Oxide Film in the Electrolyte – Oxide – Silicon System

NANOTECHNOLOGY 2012, VOL 2: ELECTRONICS, DEVICES, FABRICATION, MEMS, FLUIDICS AND COMPUTATIONAL(2012)

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Key words
tunneling current,electroplating,MOS,Electrolyte-Oxide-Silicon,metal nano particle
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