A Bottom-Up Strategy Toward A Flexible Vanadium Dioxide/Silicon Nitride Composite Film With Infrared Sensing Performance

Vanadium dioxide (VO2) attracts great attention due to its well-known metal-to-insulator transition. However, traditional VO(2)films grown on rigid substrates are inflexible, which limits their applications. In this work, we successfully prepared VO2/silicon nitride (VO2/SN) composite films by a simple template method. The VO2/SN film shows high flexibility, strong infrared absorption, and drastic resistance change (>10(3)) induced by the phase transition. The application of the VO2/SN film is presented by infrared sensing, which shows a high responsivity (720 V W-1) and short response time (409 ms).