A simplified model to predict resistivity profiles in Continuous-feeding Cz-silicon crystals

•A continuous-feeding Cz method is used to produce electronic-grade silicon crystals.•The resistivity profile in CCz-Si crystals can be predicted based on a simple model.•A model is used to study and optimize the impurity content in CCz-Si crystals.•The evaporation rate of arsenic can be deduced as fitting parameter in the model.