Realisation of a sub-wavelength dimple using a 193 nm wavelength photonic nano jet

(A) SEM image of a 1 µm silica microsphere on an SU-8 substrate. (B) AFM image of the dimple structure formed on an SU-8 substrate using a single laser pulse from an ArF laser, wavelength 193 nm, at an incident laser fluence of 45 mJ.cm−2 (1045 mJcm−2 after focussing). (C) Spatial cross-section of the dimple structure.