A High Dynamic Range Closed-Loop Stiffness-Adjustable MEMS Force Sensor

We present a microelectromechanical system (MEMS)-based closed-loop force sensor, capable of measuring bidirectional forces along one axis of motion. The device comprises an on-chip electrothermal displacement sensor and electrostatic actuators. It features a voltage-controlled stiffness-adjustment mechanism, providing the user with an additional means of tuning the sensor's characteristics. This ...