Local thickness and composition measurements from scanning convergent-beam electron diffraction of a binary non-crystalline material obtained by a pixelated detector

•Diffractions are used to determine local thickness and composition.•Electron diffractions ranging from 0 to 130 mrad were obtained by 4D-STEM.•Experiment and simulated diffractions are compared.•This method reduces the electron dose to 1/10 or less compared with EELS.