Ultra-thin HfAlO Nanofilms on Graphene Directly Deposited by Atomic Layer Deposition
2019 JOINT INTERNATIONAL EUROSOI WORKSHOP AND INTERNATIONAL CONFERENCE ON ULTIMATE INTEGRATION ON SILICON (EUROSOI-ULIS)（2019）
Key words
graphene,high-kappa nanofilms,HfAlO,atomic layer deposition,pre-H2O treatment
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