Spatial mismatch calibration based on fast partial phase correlation for interferograms in dynamic Fizeau interferometer

For a simultaneous phase-shifting interferometer (SPSI), typically four interferograms with different phase shifts are captured at different areas on the detector target by a single-shot capture method. Prior to calculating phase distribution, the region segmentation should be conducted to obtain four separated interferograms. A registration method is also necessary to eliminate the mismatch errors between the interferograms. A spatial mismatch calibration method based on fast partial phase correlation is proposed to register the spatial positions between the phase-shifting interferograms. By tilting the reflective flat, four carrier interferograms are captured to extract four phase distributions using the Fourier transform technique. Partial phase distribution is used as match characteristics to register the interferograms rapidly by employing the correlation operation. The simulation and experimental results show that the ripple error generated by spatial mismatch is suppressed well by the proposed method. (C) 2020 Society of Photo-Optical Instrumentation Engineers (SPIE)