Application of Synchrotron Radiation Based X-ray Reflectometry in Analysis of TiO2 Nanolayers, Unmodified and Irradiated with Xeq+ Ions

In this work synchrotron radiation based X-ray reflectometry method was applied for determination of morphology of TiO2 nanolayers, unmodified, and irradiated with low energy highly charged Xeq+ ions. Using the synchrotron radiation based X-ray reflectometry technique density, thickness, and roughness of the TiO2 nanolayers were determined. The results showed that the thicknesses of the nanolayers obtained with synchrotron radiation based X-ray reflectometry method agree within the experimental uncertainty with the declared thicknesses. Moreover, the density of the nanolayers is much lower than density of the bulk TiO2 due to their nanometer thickness. The results obtained for irradiated samples suggest possible amorphization and smoothening of the TiO2 nanolayers surface due to interactions of the highly charged ions.