Temperature dependence of velocity saturation in a multilayer molybdenum disulfide transistor

SEMICONDUCTOR SCIENCE AND TECHNOLOGY(2020)

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摘要
Velocity saturation in semiconducting devices is an important parameter that involves in the determination of the upper limit of the operational speed. The large contact resistance in two-dimensional semiconducting nano-devices is troublesome for extracting the saturation velocity from the electrical transport measurements, particularly at low temperatures. We obtain the saturation velocity for multilayer MoS2 from 10 to 300 K using the four-probe method to exclude contact effects. The saturation velocity exhibits strong temperature dependence, with a substantial enhancement at low temperature similar to the mobility, that is, similar to 5.2 x 10(5) cm s(-1) at 300 K and similar to 4.8 x 10(6) cm s(-1) at 10 K. The overall temperature dependence of the saturation velocity can be well represented using an empirical model previously used for Si.
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关键词
velocity saturation,multilayer molybdenum disulfide,four-probe measurement
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