Microstructures and properties of novel nanocomposite WNx coatings deposited by reactive magnetron sputtering

Yang Deng,Shiheng Yin,Yue Hong,Yi Wang, Yi Hu,Gaopeng Zou,Tongchun Kuang,Kesong Zhou

Applied Surface Science（2020）

引用 14|浏览14

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摘要

•Phase structure of the WNx coating is closely associated with the deposition power.•The nanocomposite WNx consists of bcc-W and fcc-W2N embedded into amorphous matrix.•High deposition power finally results in the formation of nanocomposite structure.•The novel nanocomposite WNx coating shows high hardness and high fracture toughness.

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关键词

WNx coatings,Reactive magnetron sputtering,Nanocomposite structure,Microstructure characterization,Mechanical property

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