Surface morphology of polar, semipolar and nonpolar freestanding GaN after chemical etching
Applied Surface Science(2020)
摘要
•Residues might exist in a smooth surface acquired from polishing treatments.•Surface etching methods to remove the residues for different GaN planes are proposed.•AFM help identify the type of crystal surface of GaN.
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关键词
GaN,Surface morphology,Surface etching,Polar,Semipolar,Nonpolar
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