Microstructures and mechanical properties of AlCrN/TiSiN nanomultilayer coatings consisting of fcc single-phase solid solution

•AlCrN/TiSiN nanomultilayer coatings consisting of single-phase fcc-AlCrTiSiN solid solution were prepared.•Fine microstructures at atomic scale were studied.•Growth behavior of coatings is mainly controlled by the competition between surface energy and strain energy.•The Cr etching induced an amorphous loose layer between substrate and coating.•High substrate bias voltage promoted the transformation of amorphous phase to (Cr,Fe)N solid solution.