Analysis of the Corrosion Failure of a Semiconductor Polycrystalline Distillation Column

•An accident on corrosion of a polycrystalline distillation column was investigated.•The main corrosion forms are pitting corrosion and stress corrosion caused by Cl−.•Corrosion rate of 316L stainless steel is negatively correlated with the pH.•Corrosion rate of 316L stainless steel is positively correlated with temperature.•Transformation from pitting corrosion to stress corrosion occurs at high temperature.