Design and fabrication of vertically aligned single-crystalline Si nanotube arrays and their enhanced broadband absorption properties
Applied Surface Science(2020)
摘要
•A new method has been proposed to fabricate well-ordered Si nanotube arrays.•No additional complex photolithographic techniques are required.•The Si nanotubes are single crystalline with an axial orientation of [0 0 1] direction.•The produced Si nanotubes show greatly enhanced broadband absorption properties.
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关键词
Si nanotube,Nanosphere lithography,Oxygen plasma,Au-catalyzed etching,Hydrophobicity,Broadband light absorption
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