AlGaN/GaN HEMT based sensor and system for polar liquid detection

Nidhi Chaturvedi,Kuldip Singh,Pharyanshu Kachhawa,Richard Lossy,Shivanshu Mishra,Ashok Chauhan,Dheeraj K. Kharbanda,Amber Kumar Jain,Rajiv Ranjan Thakur, Devanshu Saxena,Pramod K. Khanna,Joachim Wuerfl

Sensors and Actuators A: Physical（2020）

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摘要

•AlGaN/GaN HEMT based polar sensor showing a drain current of 21.2 mA at 3.3 V.•Sensor can detect water with different metal ion contamination and different polar liquids based on their different dipole moments.•Sensor shows easily detectable change in drain current for different polar liquids which lies in range of 100–350 μA.•Sensor has a sensitivity of 5.98 mA/mm/Debye for detection of polar liquids.

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关键词

HEMT,LTCC,Polar liquid sensor,Dipole moment

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