Experimental Study Of Characteristics Of Discharge Shock Waves In High-Repetition-Rate Excimer Lasers

The characteristics of the discharge shock waves in high-repetition-rate excimer laser discharge chambers arc experimentally investigated using the shadow method. This results represent the generation and evolution of the discharge shock waves. Thus, three typical forms of discharge shock waves, i.e., transverse, longitudinal (the main electrode shock wave), and preionization shock waves, arc obtained. Further, the velocities of these shock waves arc estimated, and the repetition rate at which the shock waves may effect the discharge is analyzed. The results of this study support the design of discharge-shock-wave suppression devices in high-repetition-rate discharge chambers.