Development of MEMS microsensors, aiming at the application in the study of muscle fatigue in vivo

Kaique F. Sanches,S G Selva Jessica, Daniel D. Purificacao,Mauro Bertotti,N P Carreno Marcelo

2019 34th Symposium on Microelectronics Technology and Devices (SBMicro)（2019）

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摘要

The following topics are dealt with: elemental semiconductors; MOSFET; silicon; silicon-on-insulator; solar cells; nanowires; III-V semiconductors; semiconductor growth; gallium arsenide; silicon compounds.

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关键词

MEA probe,MEMS microneedle,pH sensor,Muscle fatigue,Microelectrode,Cyclic voltammeter

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