Quasi-Vertical GaN Schottky Barrier Diode on Silicon Substrate With 10 10 High On/Off Current Ratio and Low Specific On-Resistance
IEEE Electron Device Letters(2020)
摘要
In this letter, we report a quasi-vertical GaN Schottky barrier diode (SBD) fabricated on a hetero-epitaxial layer on silicon with low dislocation density and high carrier mobility. The reduction of dislocation is realized by inserting a thin layer with high density of Ga vacancies to promote the dislocation bending. The dislocation density is
${1.6}\times {10}^{{8}}$
cm
−2
with a GaN drift layer thickness of
$4.5~\mu \text{m}$
. The fabricated prototype GaN SBD delivers a high on/off current ratio of
$10^{{10}}$
, a high forward current density of 1.6 kA/cm
2
@3 V, a low specific on-resistance of 1.1
$\text{m}\Omega \cdot \text {cm}^{{2}}$
, and a low ideality factor of 1.23.
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关键词
GaN on Si,dislocation bending,vertical structure,Schottky barrier diode
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