Broadband Sub-{\lambda} GHz ITO Plasmonic Mach-Zehnder Modulator on Silicon Photonics

Amin Rubab,Maiti Rishi,Gui Yaliang,Suer Can,Miscuglio Mario,Heidari Elham,Chen Ray T.,Dalir Hamed,Sorger Volker J.

arxiv（2019）

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摘要

Here, we demonstrate a spectrally broadband, GHz-fast Mach-Zehnder interferometeric modulator, exhibiting a miniscule VpL of 95 V-um, deploying a sub-wavelength short electrostatically tunable plasmonic phase-shifter, based on heterogeneously integrated ITO thin films into silicon photonics.

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