Thermal Kinetic Inductance Detectors for Millimeter-Wave Astrophysics

Thermal Kinetic Inductance Detectors (TKIDs) combine the excellent noise performance of traditional bolometers with a radio frequency (RF) multiplexing architecture that enables the large detector counts needed for the next generation of millimeter-wave instruments. Here we present dark prototype TKID pixels that demonstrate a noise equivalent power NEP = $2 \times 10^{-17} \mathrm{W}/\mathrm{\sqrt{Hz}} $ with a $1/f$ knee at 0.1 Hz, suitable for background-limited noise performance at 150 GHz from a ground-based site. We discuss the optimizations in the device design and fabrication techniques to realize optimal electrical performance and high quality factors at a bath temperature of 250 mK.