Simulation and Experiment of a Diamond‐type Micro‐displacement Amplifier Driven by Piezoelectric Actuator

The micro-displacement amplifier has been widely used to magnify the outputs of piezoelectric actuators for some large displacement required applications, and the amplification and frequency are the most important elements for designing the amplifying mechanisms. This study presents the design of a diamond-type micro-displacement amplifier (DMDA) and simulates its working performances by using the finite element method. After the theoretical values of amplification and natural frequency are calculated, the effects of system parameters such as angle, arm and body thicknesses, corner radius, side and edge widths, on the changes of amplification and stability are studied. Then experiments are carried out to verify the theoretical simulations and further study the amplification mechanism. Finally, a micro-droplet jetting dispenser featuring the DMDA is constructed. The perfect jetting performance shows the good application of DMDA in microelectronics packaging field. This study finds that with the increase of the angle and the arm thickness, the amplification decreases and the natural frequency increases obviously. A larger value of corner radius or side width produces a smaller natural frequency. Besides, the increase of edge width enlarges the amplification and reduces the natural frequency. This study can be used to guide the design of this kind of micro-displacement amplifier.