WO3 processed by direct laser interference patterning for NO2 detection

L. Parellada-Monreal,S. Gherardi,G. Zonta,C. Malagù,D. Casotti,G. Cruciani, V. Guidi,M. Martínez-Calderón,I. Castro-Hurtado, D. Gamarra,J. Lozano,L. Presmanes,G.G. Mandayo

Sensors and Actuators B: Chemical（2020）

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摘要

•WO3 sensors only-annealed and processed by DLIP after annealing have been fabricated.•Two-dimensional DLIP generates stripes with a hole structure on the WO3 surface.•Tetragonal crystal structure is shown for the two types of WO3 layers.•DLIP processed sensing layers present great selectivity towards NO2 with a LOD of 10 ppb.•NO2 detection mechanism for the two types of sensors is discussed and analyzed.

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关键词

WO3,DLIP,Tetragonal phase,TOF-SIMS,NO2,Arrhenius

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