Experimental study of simultaneous measuring of film Young’s modulus and adhesion by the Non-destructive CZM-SAW technique
2019 8th International Symposium on Next Generation Electronics (ISNE)(2019)
摘要
The surface acoustic wave (SAW) technique is valuable to determine the property of thin film because it requires only elastic deformation. It features non-destructive measurement, easy operation, time-saving and isolates substrate coupling. In the recent study, the surface acoustic wave technique with cohesive zone model (CZM-SAW) is proposed to measure the film Young's modulus and adhesion simultaneously. In this study, the simultaneous CZM-SAW technique is further studied by the experimental study. The experimental results show that for the film with bad adhesion property and porous low-k film with lower Young's modulus, for the reliability of measuring results, it is highly required to use simultaneous CZM-SAW technique to measure the film Young's modulus and adhesion. Moreover, the film test results are compared with nano-indentation test and nano-scratch test. By comparison, the unique advantages of the CZM-SAW technique are well demonstrated.
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关键词
Surface acoustic wave,Cohesive zone model,Low-k film,Young’s modulus,Adhesion,Non-destructive determination
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