Combination of a millimeter scale reactor and gas chromatography-mass spectrometry for mapping higher order silane formation during monosilane pyrolysis

Guro Marie Wyller,Thomas J. Preston, Anjitha S.G., Marte O. Skare,Erik S. Marstein

Journal of Crystal Growth（2020）

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摘要

•We performed experiments of monosilane pyrolysis in a millimeter scale reactor.•Cyclic and non-cyclic silanes exhibit very different behavior during pyrolysis.•We suggest that reducing cyclic silane production also reduces fines formation.

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关键词

A1. Nucleation,A1. Higher order silanes,A2. Growth from vapor,A2. Fluidized bed reactor,A3. Chemical vapor deposition processes,A3. Polysilicon production processes

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