Optical characterization of low temperature amorphous MoOX, WOX, and VOX prepared by pulsed laser deposition

Eva Horynová,Oleksandr Romanyuk,Lukáš Horák,Zdeněk Remeš,Brianna Conrad,Amalraj Peter Amalathas,Lucie Landová,Jana Houdková,Petr Jiříček,Tomáš Finsterle,Jakub Holovský

Thin Solid Films（2020）

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摘要

•Amorphous MoOx, WOx, and VOx were prepared by pulsed laser deposition.•Films demonstrate high transparency and high work function.•Oxygen pressure is a key optimization parameter for pulsed laser deposition.•Photothermal deflection spectroscopy decouples absorptance and reflectance effects.•Absorption coefficient and refractive index for a range of materials are given.

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关键词

Transparent metal oxide,Work function, Pulsed laser deposition,Optical spectroscopy,Urbach energy,Work function,Photothermal deflection spectroscopy

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