Characterization Of Smooth Dielectric Samples With Highly Focused Gaussian Beams In A Scatterometer

Michal Mrnka,Per H. Nielsen,Tonny Rubak,Cecilia Cappellin,Roger Appleby,Elena Saenz

2019 44TH INTERNATIONAL CONFERENCE ON INFRARED, MILLIMETER, AND TERAHERTZ WAVES (IRMMW-THZ)（2019）

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摘要

This paper describes a numerical validation of the transmission coefficient of a smooth dielectric sample recently measured at ESA-ESTEC during the integration testing of a scatterometer operating in 50-750 GHz frequency range. The aim of the paper is to compare the experimental results of a calibrated measurement with a numerical model in GRASP and describe a numerical method for extracting material parameters.

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关键词

numerical validation,transmission coefficient,smooth dielectric sample,ESA-ESTEC,integration testing,scatterometer,calibrated measurement,highly focused gaussian beams,GRASP,material parameters,frequency 50.0 GHz to 750.0 GHz

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