Infrared-Laser based Characterization of the Pyroelectricity in AlScN Thin-Films

Sebastian Bette,Simon Fichtner, Sebastian Bröker,Lutz Nielen,Thorsten Schmitz-Kempen,Bernhard Wagner, Carl Van Buggenhout,Stephan Tiedke,Stefan Tappertzhofen

Thin Solid Films（2019）

引用 16|浏览14

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摘要

•Laser-based stimulation of AlScN reveals deeper understanding of its pyroelectricity.•Piezoelectric clamping dominates pyroelectric response.•Substrate clamping is important for fabrication of exposed membranes.

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关键词

Pyroelectric,Piezoelectric,Aluminum-scandium-nitride,AlScN

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