Atomic engineering of metastable BeO6 octahedra in a rocksalt framework

Woo Chul Lee,Sangtae Kim,Eric S. Larsen,Jung-Hae Choi,Seung-Hyub Baek,Minji Lee,Deok-Yong Cho,Han-Koo Lee,Cheol Seong Hwang,Christopher W. Bielawski,Seong Keun Kim

Applied Surface Science（2020）

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摘要

•BeO6 octahedra, a highly metastable local structure, are stabilized by ALD.•An isostructural matrix demonstrates stabilization of highly metastable BeO6 octahedra.•BexMg1-xO films exhibit almost doubled k with the presence of BeO6 octahedra.

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关键词

Metastable phase stabilization,Octahedral BeO6,Rocksalt,High-k dielectric,Atomic layer deposition

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