Microstructure and Magnetic Properties of Magnetron-Sputtered [Fe/Pt]ₙ Multilayer Films

[Fe/Pt](n) multilayer films were prepared on thermally oxidized Si (100) substrates at 300 degrees C using dc magnetron sputtering and annealed for different temperature ranging from 350 to 500 degrees C. It is found that the as-deposited [Fe/Pt](n) multilayer films exhibit well-resolved periodic structures and low roughness of interface. The ordering degree of the annealed films decreases and their perpendicular magnetic anisotropy deteriorates with increasing the period number. Fe/Pt bilayer film annealed at 350 degrees C shows (001) orientation and hard magnetic characteristic, the coercivity and perpendicular anisotropy enhance with increase of annealing temperature. In addition, the hard and soft magnetic phases are not fully magnetically coupled in the Fe/Pt film annealed at higher temperature.