The AIM Photonics MPW: A Highly Accessible Cutting Edge Technology for Rapid Prototyping of Photonic Integrated Circuits

IEEE Journal of Selected Topics in Quantum Electronics(2019)

引用 109|浏览78
暂无评分
摘要
Silicon photonics has been heralded for a number of high technology fields, but access to a high quality technology has been limited to vertically integrated design/fabrication companies, or fabless companies with significant resources to engage high volume fabs. More recently, research and development hubs have developed and released process design kits and multi-project wafer programs to lower t...
更多
查看译文
关键词
Photonics,Silicon,Fabrication,Libraries,Tools,Process design
AI 理解论文
溯源树
样例
生成溯源树,研究论文发展脉络
Chat Paper
正在生成论文摘要