Liquid Microlens Enabling Tunable Focus and Tilt for Resolution Enhancement of 3D Image
2019 20TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS & EUROSENSORS XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)（2019）
关键词
Tunable focus,Beam tilt,Liquid lens,EWOD,MEMS
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