Control of Surface Potential in WO 3 Gas Sensors Using UV Light

international conference on solid state sensors actuators and microsystems(2019)

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摘要
We introduce the first control of surface potential (SP) in MOX gas sensors using UV light (367 nm). The control is based on sigma-delta modulation implementing a sliding mode control on the surface potential of the sensor. Measurements are presented using a sensor made of WO 3 nanowires under mild heating at 125 oC. Without control, the sensor shows no response to ethanol. Under control, the detection limit is beyond 2 ppm with a response time below 5 minutes. For NO 2 , the response time is reduced by a factor of 10. By operating the sensor at constant SP it is possible to improve both dynamics and sensitivity. This new methodology applies generally to a wide range of gas sensitive materials and transducing elements.
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关键词
MOX gas sensor, WO3 nanowires, surface potential, UV light, sigma-delta modulation, sliding mode control
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