Multi-frequency Piezoelectric Micromachined Ultrasonic Transducers

Hanie Kazari,Minoo Kabir,Amir Mostavi,Didem Ozevin

IEEE Sensors Journal（2019）

引用 19|浏览6

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摘要

In this paper multi-frequency piezoelectric MEMS ultrasonic transducers (pMUTs) are designed, characterized and tested for nondestructive evaluation (NDE) of solids. The transducers operate in flexural mode, and are tuned to three different frequencies namely 1 MHz, 1.5 MHz and 2 MHz. The microstructural layers consist of aluminum nitride (AlN) as an active sensing layer sandwiched between metal a...

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关键词

Transducers,Aluminum nitride,III-V semiconductor materials,Silicon,Ultrasonic transducers,Acoustics,Micromechanical devices

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