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3D-Integrated Multi-Sensor Demonstrator System for Environmental Monitoring

Anton Koeck,Robert Wimmer-Teubenbacher, Florentyna Sosada-Ludwikovska,Karl Rohracher,Ewald Wachmann,Martin Herold, Ton van Welden,Jong Min Kim,Zeeshan Ali, Anneliese Poenninger,Markus Stahl-Offergeld,Hans-Peter Hohe, Juergen Lorenz,Tobias Erlbacher,Guido Dolmans,Peter Offermans, Marianne Vandecasteele,Olena Yurchenko,Oliver von Sicard,Roland Pohle,Florin Udrea,Claudio Falco,Denis Flandre,David Bol,Elisabetta Comini,Dario Zappa,Julian Gardner,Marina Cole,Jan Theunis,Jan Peters, Alan Baldwin

2019 20TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS & EUROSENSORS XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)（2019）

Cited 2|Views37
Key words
Smart Sensor System,Multi-Sensor Device,3D-System Integration,Heterogeneous Integration,Multifunctional Nanomaterials
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