Monolithic Integration of CMOS Temperature Control Circuit and Si 3 N 4 Microring Filters for Wavelength Stabilization Within Ultra Wide Operating Temperature Range

Microring resonators are widely used for both active and passive devices for their small footprint and low- power consumption. However, it is very challenging to achieve precise control of stability of the resonant wavelength, as the microring is very sensitive to fabrication imperfections and temperature variations. In this paper, we propose and demonstrate a new method of monolithic integration ...