ZnO nanorod-based Love wave delay line for high mass sensitivity: A finite element analysis
IET Science, Measurement & Technology（2019）
摘要
This study presents finite element time-domain simulation of a SiO2/36°-YX LiTaO3 Love wave (LW) delay line to explore coupled resonance phenomenon with ZnO nanorods designed on the top surface of the device. The effect of variation in ZnO nanorods height on the propagation of LW, mode-transitions, area-averaged stress, insertion loss, and mass sensitivity of the device is studied. Simulation resu...
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关键词
acoustic impedance,acoustic wave propagation,finite element analysis,II-VI semiconductors,lithium compounds,Love waves,nanorods,nanosensors,silicon compounds,surface acoustic wave delay lines,surface acoustic wave sensors,wide band gap semiconductors,zinc compounds
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