Comprehensive Scaling Study on 3D Cross-Point PCM Toward 1znm Node for SCM Applications

W. C. Chien,H. Y. Ho,C. W. Yeh,C. H. Yang,H. Y. Cheng,W. Kim,I. T. Kuo,L. M. Gignac,E. K. Lai,N. Gong,Y. C. Chou,C. W. Cheng,Y. F. Lin,J. M. Papalia,F. Carta,A. Ray,R. L. Bruce, M. BriahtSky,H. L. Lung

2019 Symposium on VLSI Technology（2019）

引用 24|浏览33

关键词

voltage distribution,3D Cross-point PCM,low leakage current,OTS-PCM,low metal line loading resistance,low operation current,Storage Class Memory applications,XPCM,SCM applications

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