Reliability of two-layer IGZO TFT by inductively coupled plasma sputtering

Daisuke Matsuo,Ryoko Miyanaga,Takuya Ikeda, Shigeaki Kishida,Yoshitaka Setogucti, Yasunori Andoh,Mami Fujii,Yukiharu Uraoka

The Japan Society of Applied Physics(2019)

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