Investigation of Atomic-layer Defect-free Ge Etching by HBr Neutral BeamDaisuke Ohori,Takuya Fujii,Shuichi Noda,Wataru Mizubayashi,Kazuhiko Endo,Yiming Li,Yao-Jen Lee,Takuya Ozaki,Seiji SamukawaThe Japan Society of Applied Physics(2019)引用 23|浏览15暂无评分AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要