A 2.92-µW Capacitance-to-Digital Converter With Differential Bondwire Accelerometer, On-Chip Air Pressure, and Humidity Sensor in 0.18-µm CMOS.

This paper presents a sensor front end for air pressure sensor, relative humidity (RH) sensor, and accelerometer in a standard CMOS process, equipped with a wide input range high-resolution capacitance-to-digital converter (CDC). For air pressure and RH, interdigitated top metals in air and polyimide are exploited, respectively, which exhibit the change in dielectric constant. For acceleration, se...