Fabrication Of Nanogranular Tio2 Thin Films By Silar Technique: Application For No2 Gas Sensor

The present investigation reports on the Nitrogen dioxide (NO2) gas sensing properties of the nanogrannular Titanium dioxide (TiO2) thin films synthesized on a glass substrate using simplistic successive ionic layer adsorption and reaction (SILAR) technique at room temperature. The deposition of TiO2 thin films was carried out by varying the SILAR reaction cycles. The synthesized TiO2 thin films showed a granular morphology of size 50-100 nm with an orthorhombic structure. The photoluminescence spectra of nanogranular TiO2 thin films exhibits absorption band edge in the visible region (similar to 442 nm). The gas sensing performance are evaluated as a function of nanogranular size of TiO2, the operating temperature, response and recovery time and sensitivity of NO2 gas from 50 to 200 ppm. A high response towards NO2 has been obtained at an operating temperature of 250 C-0. Moreover, the nanogranular TiO2 thin films based gas sensor shows better gas sensitivity towards NO2 gas at 50 ppm with good selectivity.