An Effective Process to Remove Etch Damage Prior to Selective Epitaxial Growth in 3D NAND Flash Memory
Semiconductor Science and Technology（2019）
关键词
plasma treatment,selective epitaxial growth,damage remove
AI 理解论文
溯源树
样例
生成溯源树，研究论文发展脉络
Chat Paper
正在生成论文摘要