Low-energy electron microscopy of graphene outside UHV: electron-induced removal of PMMA residues used for graphene transfer

E. Materna Mikmeková,I. Müllerová,L. Frank,A. Paták,J. Polčák, S. Sluyterman,M. Lejeune,I. Konvalina

Journal of Electron Spectroscopy and Related Phenomena（2020）

引用 10|浏览12

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摘要

•New technique to achieve a polymer-free CVD graphene is presented.•Slow electrons were used for the samples cleaning.•Graphene layers were counted by slow electrons in SEM/STEM (outside UHV).

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关键词

Graphene,PMMA,Slow electron treatment,XPS,Raman spectroscopy

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